Exciting New Capabilities

• Double seals and conflat flanges for world class purity from Nitrogen  contamination.

• PPB Nitrogen leak purity implemented with differentially pumped O rings and Conflat Flange on all seals (compare with O rings on prior systems)

• Highest available MW power (12kW available, 15KW in testing) for larger area/higher growth rate processes.

• 6-600 Torr pressure range

• Advanced process control and monitoring including internet access to system control functions.

• Customizable fixturing, viewports for in-situ monitoring.

• Powerful software includes 24/7 all parameter logging, advanced (trailing) interlocks and web/mobile access to system data and control

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Indispensable Features

• Bias Enhanced Nucleation (BEN) for heteroepitaxy See - Nature.com

• 100mm (4") diameter wafer heater providing +-10% uniformity microcrystalline thin diamond films

• Temperature controlled Translation Stage for large single crystal growth

• No line of sight between quartz microwave window and plasma to reduce silicon contamination from the window - a common issue due to atomic hydrogen reaction with quartz silicon dioxide.

• Stable plasma for widest range in pressure, power and substrate geometry

• Integrated Helium leak testing port 

• Power upgradeable to 15KW (retrofitted to existing systems)

• World Class Electronic Performance, 100mm diamond coating diameter

Breakthrough Results

• White Diamond Tube: 5mm ID, 2 cm long

• DEF Color Multicarat weight diamond gems

• Polycrystalline and Single Crystal Detectors